Gas filters, FG series, Wafergard® SG

Leverandør: ENTEGRIS
Ratings: Ingen bedømmelse

Samlet vurdering
Gennemsntilig vurdering

WGFGMBSS3 WGFGT1PS1 WGFGMBRR4 YY5001HR1 WGFGMBRR2 WGFGMBSS2 YY5032PR1 WGFG32PS1 WGFGMBSS4 YY5032PS1 WGFG02PR1 WGFG02PS1 WGFG50PR1 WGFGT1PR1 YY5002PR1 YY5001HS1
ENTEWGFGMBSS3EA 0 DKK
ENTEWGFGMBSS3 ENTEWGFGT1PS1 ENTEWGFGMBRR4 ENTEYY5001HR1 ENTEWGFGMBRR2 ENTEWGFGMBSS2 ENTEYY5032PR1 ENTEWGFG32PS1 ENTEWGFGMBSS4 ENTEYY5032PS1 ENTEWGFG02PR1 ENTEWGFG02PS1 ENTEWGFG50PR1 ENTEWGFGT1PR1 ENTEYY5002PR1 ENTEYY5001HS1
Gas filters, FG series, Wafergard® SG
Filtre Gasfiltre
Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

  • Complatible with high-purity gases including N₂, CDA, H₂, SiH₄ and NF₃
  • Superior downstream cleanliness with retention rate of 9 LRV at rated flow

Filter element: Hydrophobic PTFE membrane supported by molded PTFE, PFA structure and PFA O-ring; Housing: electropolished 316 L stainless steel

Maximum forward differential pressure: 4,14 bar at 23 °C

Maximum reverse differential pressure: 0,69 bar at 23 °C
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Specifikationer

Environmentally Preferable
Max. operating pressure 40 bar @ 23 °C 200 bar @ 23 °C 40 bar @ 23 °C 40 bar @ 23 °C 40 bar @ 23 °C 200 bar @ 23 °C 200 bar @ 23 °C 40 bar @ 23 °C 200 bar @ 23 °C 200 bar @ 23 °C 200 bar @ 23 °C 200 bar @ 23 °C 200 bar @ 23 °C 200 bar @ 23 °C
Leak rating Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
Maks. driftstemperatur 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases 120 °C in inert gases
Fitting size ³/₈" compression seal ¹/₄" compression seal ¹/₂" gasket seal ¹/₄" gasket seal ¹/₄" compression seal ³/₈" gasket seal ³/₈" compression seal ¹/₂" compression seal ³/₈" compression seal ¹/₄" gasket seal ¹/₄" compression seal ¹/₂" gasket seal ¹/₄" gasket seal ¹/₄" gasket seal
Filter 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm 0,003 µm
Ø×L 117,9×35,5 mm 73,7×19,05 mm 127×35,5 mm 127×35,5 mm 112,7×35,5 mm 133,5×28,5 mm 115,5×28,4 mm 118,7×35,5 mm 119,3×28,5 mm 127×28,4 mm 115,5×28,4 mm 127×28,4 mm 84,1×19,05 mm 127×28,5 mm

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